Coherent light generators – Miscellaneous
Reexamination Certificate
2006-05-16
2006-05-16
Nguyen, Hoang V. (Department: 2821)
Coherent light generators
Miscellaneous
C372S103000, C430S005000
Reexamination Certificate
active
07046715
ABSTRACT:
Accordingly, a method of suppressing energy spikes is provided comprising projecting a laser beam through a mask having a slit pattern comprising a corner region with edges, and a blocking feature with the corner region to reduce energy spikes projected on a substrate. An alternative method is provided, wherein the corner region is modified such that it is replaced by a more tapered shaped region, preferably a triangle. Also provided, are a variety of mask designs incorporating both corner regions, with and without one or more blocking features, and triangular regions, with or without one or more blocking features. The mask designs provide examples of mask modifications that may be used to reduce energy spikes.
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Crowder Mark A.
Mitiani Yasuhiro
Voutsas Apostolos T.
Al-Nazer Leith A.
Law Office of Gerald Maliszewski
Maliszewski Gerald
Nguyen Hoang V.
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