Method for supplying vacuum evaporation material

Coating processes – Coating by vapor – gas – or smoke

Patent

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

427250, 4272552, 427294, C23C 1600

Patent

active

050987429

ABSTRACT:
A method for supplying a vacuum evaporation material provides a first vacuum evaporation material accommodated in a crucible and heated by electron beams so as to be fused. When a thin film is formed by adhering vapor generated form the first material to a substrate, a second long supply vacuum evaporation material is fed in a positive direction, the second material moving from above a liquid surface of the first material toward the first material which has fused in the crucible. An average feed speed of the second material is maintained by alternately switching a feed direction between the positive direction and the negative direction, in which the second material moves backward. An apparatus for supplying the vacuum evaporation material in which the first material is supplied to the crucible by alternately switching the feed direction between the positive and the negative directions, includes an operating circuit for performing the following calculation based on an instruction of an average supply speed (V.sub.AV) for feeding the second material:

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Method for supplying vacuum evaporation material does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method for supplying vacuum evaporation material, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method for supplying vacuum evaporation material will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-2008995

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.