Coating processes – Coating by vapor – gas – or smoke
Patent
1990-06-18
1992-03-24
Pianalto, Bernard
Coating processes
Coating by vapor, gas, or smoke
427250, 4272552, 427294, C23C 1600
Patent
active
050987429
ABSTRACT:
A method for supplying a vacuum evaporation material provides a first vacuum evaporation material accommodated in a crucible and heated by electron beams so as to be fused. When a thin film is formed by adhering vapor generated form the first material to a substrate, a second long supply vacuum evaporation material is fed in a positive direction, the second material moving from above a liquid surface of the first material toward the first material which has fused in the crucible. An average feed speed of the second material is maintained by alternately switching a feed direction between the positive direction and the negative direction, in which the second material moves backward. An apparatus for supplying the vacuum evaporation material in which the first material is supplied to the crucible by alternately switching the feed direction between the positive and the negative directions, includes an operating circuit for performing the following calculation based on an instruction of an average supply speed (V.sub.AV) for feeding the second material:
Akutagawa Ryutarou
Inoue Isamu
Kodama Kayoko
Shintaku Hidenobu
Takegawa Hirozo
Matsushita Electric - Industrial Co., Ltd.
Pianalto Bernard
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