Method for supplying metal organic gas and an apparatus for real

Details Method for supplying metal organic gas and an apparatus for real Method for supplying metal organic gas and an apparatus for real

1987-05-19

1988-11-08

Bueker, Richard

Coating processes

Measuring, testing, or indicating

4272481, 118692, 118726, 261DIG65, C23C 1652

Patent

active

047833432

ABSTRACT:
In a reduced pressure gaseous phase thin film growth device, in which the pressure within a bubbler is detected during bubbling of an organo-metallic compound and depending on the pressure thus detected, a pressure difference valve disposed between a pipe for introducing trimethylaluminium gas and a reduced pressure reactor is controlled so that the pressure within the bubbler is kept to be constant.

REFERENCES:
patent: 4436674 (1984-03-01), McMenamin
patent: 4488506 (1984-12-01), Heinecke
patent: 4545801 (1985-10-01), Miyajiri
patent: 4619844 (1986-10-01), Pierce
patent: 4640221 (1987-02-01), Barbee
patent: 4683143 (1987-07-01), Riley

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