Method for supplying a polishing liquid and polishing method usi

Details Method for supplying a polishing liquid and polishing method usi Method for supplying a polishing liquid and polishing method usi

1995-02-13

1997-02-18

Eley, Timothy V.

Abrading

Abrading process

Utilizing fluent abradant

451 60, B24B 100

Patent

active

056036540

ABSTRACT:
The invention provides a novel method of supplying a polishing liquid onto a surface of a polishing pad with which a surface of a film is polished wherein a solution including an aggregation agent and a slurry into which fine polishing particles were already dispersed are separately supplied onto the polishing surface so that the slurry is mixed with the solution to thereby cause an aggregation of the fine polishing particles to form aggregated particles to be used for polishing.

REFERENCES:
patent: 3500591 (1970-03-01), Gawronski et al.
patent: 3638366 (1972-02-01), Gamache
patent: 4059929 (1977-11-01), Bishop
patent: 4435247 (1984-03-01), Basi et al.

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