Cleaning and liquid contact with solids – Processes – Including application of electrical radiant or wave energy...
Reexamination Certificate
2005-08-09
2005-08-09
Barr, Michael (Department: 1746)
Cleaning and liquid contact with solids
Processes
Including application of electrical radiant or wave energy...
C134S025400, C134S902000, C414S805000
Reexamination Certificate
active
06926012
ABSTRACT:
An apparatus for supercritical processing of multiple workpieces comprises a transfer module, first and second supercritical processing modules, and a robot. The transfer module includes an entrance. The first and second supercritical processing modules are coupled to the transfer module. The robot is preferably located with the transfer module. In operation, the robot transfers a first workpiece from the entrance of the transfer module to the first supercritical processing module. The robot then transfers a second workpiece from the entrance to the second supercritical processing module. After the workpieces have been processed, the robot returns the first and second workpieces to the entrance of the transfer module. Alternatively, the apparatus includes additional supercritical processing modules coupled to the transfer module.
REFERENCES:
patent: 2617719 (1952-11-01), Stewart
patent: 2625886 (1953-01-01), Browne
patent: 3744660 (1973-07-01), Gaines et al.
patent: 3890176 (1975-06-01), Bolon
patent: 3900551 (1975-08-01), Bardoncelli et al.
patent: 3968885 (1976-07-01), Hassan et al.
patent: 4029517 (1977-06-01), Rand
patent: 4091643 (1978-05-01), Zucchini
patent: 4219333 (1980-08-01), Harris
patent: 4245154 (1981-01-01), Uehara et al.
patent: 4341592 (1982-07-01), Shortes et al.
patent: 4355937 (1982-10-01), Mack et al.
patent: 4367140 (1983-01-01), Wilson
patent: 4406596 (1983-09-01), Budde
patent: 4422651 (1983-12-01), Platts
patent: 4474199 (1984-10-01), Blaudszun
patent: 4475993 (1984-10-01), Blander et al.
patent: 4522788 (1985-06-01), Sitek et al.
patent: 4549467 (1985-10-01), Wilden et al.
patent: 4592306 (1986-06-01), Gallego
patent: 4601181 (1986-07-01), Privat
patent: 4626509 (1986-12-01), Lyman
patent: 4670126 (1987-06-01), Messer et al.
patent: 4682937 (1987-07-01), Credle, Jr.
patent: 4693777 (1987-09-01), Hazano et al.
patent: 4749440 (1988-06-01), Blackwood et al.
patent: 4778356 (1988-10-01), Hicks
patent: 4788043 (1988-11-01), Kagiyama et al.
patent: 4789077 (1988-12-01), Noe
patent: 4823976 (1989-04-01), White, III et al.
patent: 4825808 (1989-05-01), Takahashi et al.
patent: 4827867 (1989-05-01), Takei et al.
patent: 4838476 (1989-06-01), Rahn
patent: 4865061 (1989-09-01), Fowler et al.
patent: 4877530 (1989-10-01), Moses
patent: 4879004 (1989-11-01), Oesch et al.
patent: 4879431 (1989-11-01), Bertoncini
patent: 4917556 (1990-04-01), Stark et al.
patent: 4923828 (1990-05-01), Gluck et al.
patent: 4924892 (1990-05-01), Kiba et al.
patent: 4933404 (1990-06-01), Beckman et al.
patent: 4944837 (1990-07-01), Nishikawa et al.
patent: 4951601 (1990-08-01), Maydan et al.
patent: 4960140 (1990-10-01), Ishijima et al.
patent: 4983223 (1991-01-01), Gessner
patent: 5011542 (1991-04-01), Weil
patent: 5013366 (1991-05-01), Jackson et al.
patent: 5044871 (1991-09-01), Davis et al.
patent: 5062770 (1991-11-01), Story et al.
patent: 5068040 (1991-11-01), Jackson
patent: 5071485 (1991-12-01), Matthews et al.
patent: 5105556 (1992-04-01), Kurokawa et al.
patent: 5143103 (1992-09-01), Basso et al.
patent: 5158704 (1992-10-01), Fulton et al.
patent: 5167716 (1992-12-01), Boitnott et al.
patent: 5169296 (1992-12-01), Wilden
patent: 5169408 (1992-12-01), Biggerstaff et al.
patent: 5174917 (1992-12-01), Monzyk
patent: 5185058 (1993-02-01), Cathey, Jr.
patent: 5185296 (1993-02-01), Morita et al.
patent: 5186594 (1993-02-01), Toshima et al.
patent: 5186718 (1993-02-01), Tepman et al.
patent: 5188515 (1993-02-01), Horn
patent: 5190373 (1993-03-01), Dickson et al.
patent: 5191993 (1993-03-01), Wanger et al.
patent: 5193560 (1993-03-01), Tanaka et al.
patent: 5195878 (1993-03-01), Sahiavo et al.
patent: 5201960 (1993-04-01), Starov
patent: 5213485 (1993-05-01), Wilden
patent: 5213619 (1993-05-01), Jackson et al.
patent: 5215592 (1993-06-01), Jackson
patent: 5217043 (1993-06-01), Novakovi
patent: 5221019 (1993-06-01), Pechacek
patent: 5222876 (1993-06-01), Budde
patent: 5224504 (1993-07-01), Thompson et al.
patent: 5225173 (1993-07-01), Wai
patent: 5236602 (1993-08-01), Jackson
patent: 5236669 (1993-08-01), Simmons et al.
patent: 5237824 (1993-08-01), Pawliszyn
patent: 5238671 (1993-08-01), Matson et al.
patent: 5240390 (1993-08-01), Kvinge et al.
patent: 5243821 (1993-09-01), Schuck et al.
patent: 5246500 (1993-09-01), Samata et al.
patent: 5250078 (1993-10-01), Saus et al.
patent: 5251776 (1993-10-01), Morgan, Jr. et al.
patent: 5261965 (1993-11-01), Moslehi
patent: 5266205 (1993-11-01), Fulton et al.
patent: 5267455 (1993-12-01), Dewees et al.
patent: 5269815 (1993-12-01), Schlenker et al.
patent: 5274129 (1993-12-01), Natale et al.
patent: 5280693 (1994-01-01), Heudecker
patent: 5285352 (1994-02-01), Pastore et al.
patent: 5288333 (1994-02-01), Tanaka et al.
patent: 5290361 (1994-03-01), Hayashida et al.
patent: 5294261 (1994-03-01), McDermott et al.
patent: 5298032 (1994-03-01), Schlenker et al.
patent: 5304515 (1994-04-01), Morita et al.
patent: 5306350 (1994-04-01), Hoy et al.
patent: 5312882 (1994-05-01), DeSimone et al.
patent: 5313965 (1994-05-01), Palen
patent: 5314574 (1994-05-01), Takahashi
patent: 5316591 (1994-05-01), Chao et al.
patent: 5328722 (1994-07-01), Ghanayem et al.
patent: 5334332 (1994-08-01), Lee
patent: 5334493 (1994-08-01), Fujita et al.
patent: 5337446 (1994-08-01), Smith et al.
patent: 5339844 (1994-08-01), Stanford, Jr. et al.
patent: 5352327 (1994-10-01), Witowski
patent: 5355901 (1994-10-01), Mielnik et al.
patent: 5356538 (1994-10-01), Wai et al.
patent: 5364497 (1994-11-01), Chau et al.
patent: 5368171 (1994-11-01), Jackson
patent: 5370740 (1994-12-01), Chao et al.
patent: 5370741 (1994-12-01), Bergman
patent: 5370742 (1994-12-01), Mitchell et al.
patent: 5377705 (1995-01-01), Smith, Jr. et al.
patent: 5401322 (1995-03-01), Marshall
patent: 5403621 (1995-04-01), Jackson et al.
patent: 5403665 (1995-04-01), Alley et al.
patent: 5404894 (1995-04-01), Shiraiwa
patent: 5412958 (1995-05-01), Iliff et al.
patent: 5417768 (1995-05-01), Smith, Jr. et al.
patent: 5433334 (1995-07-01), Reneau
patent: 5447294 (1995-09-01), Sakata et al.
patent: 5456759 (1995-10-01), Stanford, Jr. et al.
patent: 5470393 (1995-11-01), Fukazawa
patent: 5474812 (1995-12-01), Truckenmuller et al.
patent: 5482564 (1996-01-01), Douglas et al.
patent: 5486212 (1996-01-01), Mitchell et al.
patent: 5494526 (1996-02-01), Paranjpe
patent: 5500081 (1996-03-01), Bergman
patent: 5501761 (1996-03-01), Evans et al.
patent: 5503176 (1996-04-01), Dunmire et al.
patent: 5505219 (1996-04-01), Lansberry et al.
patent: 5509431 (1996-04-01), Smith, Jr. et al.
patent: 5514220 (1996-05-01), Wetmore et al.
patent: 5522938 (1996-06-01), O'Brien
patent: 5526834 (1996-06-01), Mielnik et al.
patent: 5533538 (1996-07-01), Marshall
patent: 5547774 (1996-08-01), Gimzewski et al.
patent: 5550211 (1996-08-01), DeCrosta et al.
patent: 5571330 (1996-11-01), Kyogoku
patent: 5580846 (1996-12-01), Hayashida et al.
patent: 5589082 (1996-12-01), Lin et al.
patent: 5589105 (1996-12-01), DeSimone et al.
patent: 5589224 (1996-12-01), Tepman et al.
patent: 5621982 (1997-04-01), Yamashita et al.
patent: 5629918 (1997-05-01), Ho et al.
patent: 5632847 (1997-05-01), Ohno et al.
patent: 5635463 (1997-06-01), Muraoka
patent: 5637151 (1997-06-01), Schulz
patent: 5641887 (1997-06-01), Beckman et al.
patent: 5644855 (1997-07-01), McDermott et al.
patent: 5649809 (1997-07-01), Stapelfeldt
patent: 5656097 (1997-08-01), Olesen et al.
patent: 5665527 (1997-09-01), Allen et al.
patent: 5669251 (1997-09-01), Townsend et al.
patent: 5672204 (1997-09-01), Habuka
patent: 5676705 (1997-10-01), Jureller et al.
patent: 5679169 (1997-10-01), Gonzales et al.
patent: 5679171 (1997-10-01), Saga et al.
patent: 5683473 (1997-11-01), Jureller et al.
patent: 5683977 (1997-11-01), Jureller et al.
patent: 5688879 (1997-11-01), DeSimone
patent: 5700379 (1997-12-01), Biebl
patent: 5702228 (1997-12-01), Tamai et al.
patent: 5706319 (1998-01-01), Holtz
patent: 5726211 (1998-03-01), Hedrick et al.
patent: 5730874 (1998-03-01), Wai et al.
patent: 5739223 (1998-04-01), DeSimone
patent: 5746008 (1998-05-01), Yamashita et al.
patent: 5769588 (1998-06-01), Toshi
Biberger Maximilian Albert
Layman Frederick Paul
Sutton Thomas Robert
Barr Michael
Chaudhry Saeed
Haverstock & Owens LLP
Tokyo Electron Limited
LandOfFree
Method for supercritical processing of multiple workpieces does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Method for supercritical processing of multiple workpieces, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method for supercritical processing of multiple workpieces will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3523733