Method for soldering and contouring foil E-beam windows

Metal fusion bonding – Process – With clamping or holding

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B23A 3102

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active

048010715

ABSTRACT:
A method for soldering and contouring foil E-beam windows for an excimer laser using a two step procedure during soldering to prevent stressing the foil material. The foil material is plated with nickel and soldering material in narrow strips that are spaced slightly greater than the spacing between the coolant ribs. The excess foil material between the ribs forms the desired foil curvature between ribs. The foil is pressed into place on the pre-heated coolant ribs using a template that has a bottom surface shaped exactly as the desired foil contour. The foil is held in place until the solder melts and then solidifies. When the template is removed, a contoured foil window which has not been stressed or strained, remains.

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