Method for smoothing a surface of an optical element with laser

Details Method for smoothing a surface of an optical element with laser Method for smoothing a surface of an optical element with laser

2008-10-28

2011-11-01

Vargot, Mathieu D. (Department: 1742)

Plastic and nonmetallic article shaping or treating: processes

Optical article shaping or treating

Utilizing plasma, electric, electromagnetic, particulate, or...

C264S001240, C264S001270, C264S482000

Reexamination Certificate

active

08048344

ABSTRACT:
The present invention discloses a method for smoothing a surface of an optical element with a laser. Firstly, an optical element having a rough surface is provided. Next, the rough surface of the optical element is illuminated with a laser. The rough surface absorbs laser energy and melts into a liquid. The liquid is stretched and planarized by the surface tension of the rough surface and then solidifies into a smooth surface. The present invention can smooth the surface of an optical element and promote the resonant or waveguide performance of the optical element.

REFERENCES:
patent: 7232982 (2007-06-01), Takami
patent: 62-85433 (1987-04-01), None
Cai, M.; Painter, O., and Vahala, K.J., “Fiber-coupled Microsphere Laser”, Opt. Lett., 2000, 25, pp. 1430-1432.
Bilici, T., IS-CI, S., Kurt, A., and Serpeng.Uzel, A.; “Microsphere-based Channel Dropping Filter with an Integrated Photodetector”, IEEE Photonics Technol. Lett., 2004, 16, pp. 476-478.
Tapalian, H.C., Laine, J.P., and Lane, P.A., “Thermo Optical Switches Using Coated Microsphere Resonators”, IEEE Photonics Technol. Lett., 2002, 14, pp. 1118-1120.
Teraoka, I., Arnold, S., and Vollmer, F.; “Perturbation Approach to Resonance Shifts of Whispering-Gallery Modes in a Dielectric Microsphere as a Probe of a Surrounding Medium”, J. Opt. Soc. Am.B, Opt. Phys., 2003, 20, pp. 1937-1946.
K.K. Lee, D.R. Lim, H.-C. Luan, A. Agarwal, J. Foresi, and L.C. Kimerling, “Effect of Size and Roughness on Light Transmission in a Si/SiO2 Waveguide: Experiments and Model”, Appl. Phys. Lett., 77, 1617 (2000).
A. Sakai, G. Hara, and T. Baba, “Propagation Characteristics of Ultrahigh Optical Waveguide on Silicon-on-Insulator Substrate”, Jpn.J. Appl. Phys. Part 2, 4B, L383, (2001).
P. Dumon, W. Bogaerts, J. Van Campenhout, V. Wiaux, J. Wouters, S. Beckx, and R. Baets, “Low Loss Photonic Wires and Compact Ring Resonators in Silicon-on-Insulator”, LEOS Benelux Annual Symposium 2003, Netherlands (2003).
H. Kuribayashi, R. Hiruta, and R. Shimizu, K. Sudoh and H. Iwasaki, “Shape Transformation of Silicon Trenches During Hydrogen Annealing”, J. Vac. Sci. Technol. A21, 1279 (2007).
J.S. Xia, Y. Ikegami, K. Nemoto, and Y. Shiraki, “Observation of Whispering-Gallery Modes in Si Microdisk at Room Temperature”, Appl. Phys. Lett. 90, 14102 (2007).
Satoshi Iwamoto and Yashuhiko Arakawa, “Observation of Enhanced from Silicon Photonic Crystal Nanocavity at Room Temperature”, Appl. Phys. Lett. 91, 211104 (2007).
J. Takahashi, T. Tsuchizawa, T. Watanabe, and S. Itabashi, “Oxidation-Induced Improvement in the Sidewall Morphology and Cross-Sectional Profile of Silicon Wire Waveguides”, J. Vac. Sci. Technol. B. 22, 2533 (2004).
D.K. Sparacin, S.J. Spector, and L.C. Kimerling, “Silicon Waveguide Sidewall Smoothing by Wet Chemical Oxidation”, J. Lightwave Technol. 23, 2455 (2005).
T. Tsuchizawa, T. Watanabe, E. Tamechika, T.Shoji, K. Yamada, J. Takahashi, S. Uchiyama, S. Itabashi, and H. Morita, “Fabrication and Evaluation of Submicron-Square Si Wire Waveguides with Spot-Size Converters”, Paper TuU2 presented at LEOS Annual Meeting, p. 287, Glasgow, UK (2002).

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