Cleaning and liquid contact with solids – Processes – With work or work parts movable during treatment
Patent
1992-07-30
1993-07-27
Morris, Theodore
Cleaning and liquid contact with solids
Processes
With work or work parts movable during treatment
134 33, 134 34, B08B 304
Patent
active
052307433
ABSTRACT:
A single wafer processor supports a semiconductor wafer having at least one surface that is to be subjected to contact with a fluid. The equipment includes a portable module including a gripper assembly that is rotatable about the axis of a portable housing and is capable of mechanically engaging or disengaging the edge of an individual wafer. The portable module is complementary to a receiving base having an open bowl provided with liquid jets for discharging processing liquids or reagents in parallel streams directed toward the outer surface of a rotating wafer. The bowl can also be filled with liquid for immersion treatment of a wafer, which can be held stationary or rotated at slow speeds. The portable unit is moved between base units by a robotic arm. All elements associated with holding of the wafer are physically shielded to minimize wafer contamination from environmental contact.
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Durado Daniel
Gordon Robert W.
Thompson Raymon F.
Chaudhry Saeed T.
Morris Theodore
Semitool Inc.
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