Method for shifting the bandgap energy of a quantum well layer

Semiconductor device manufacturing: process – Making device or circuit emissive of nonelectrical signal

Reexamination Certificate

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C438S036000, C438S045000

Reexamination Certificate

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06878562

ABSTRACT:
A process for shifting the bandgap energy of a quantum well layer (e.g., a III-V semiconductor quantum well layer) without inducing complex crystal defects or generating significant free carriers. The process includes introducing ions (e.g., deep-level ion species) into a quantum well structure at an elevated temperature, for example, in the range of from about 200° C. to about 700° C. The quantum well structure that has had ions introduced therein includes an upper barrier layer, a lower barrier layer and a quantum well layer. The quantum well layer is disposed between the upper barrier layer and the lower barrier layer. The quantum well structure is then thermally annealed, thereby inducing quantum well intermixing (QWI) in the quantum well structure and shifting the bandgap energy of the quantum well layer. Also, a photonic device assembly that includes a plurality of operably coupled photonic devices monolithically integrated on a single substrate using the process described above.

REFERENCES:
patent: 4511408 (1985-04-01), Holonyak, Jr.
patent: 4771010 (1988-09-01), Epler et al.
patent: 4802182 (1989-01-01), Thornton et al.
patent: 4824798 (1989-04-01), Burnham et al.
patent: 4830983 (1989-05-01), Thornton
patent: 4871690 (1989-10-01), Holonaya et al.
patent: 5031185 (1991-07-01), Murakami et al.
patent: 5145792 (1992-09-01), Hirata
patent: 5238868 (1993-08-01), Elman et al.
patent: 5276745 (1994-01-01), Revelli, Jr.
patent: 5395793 (1995-03-01), Charbonneau et al.
patent: 5539763 (1996-07-01), Takemi et al.
patent: 5556804 (1996-09-01), Nagai
patent: 5707890 (1998-01-01), Emery et al.
patent: 5757023 (1998-05-01), Koteles et al.
patent: 6027989 (2000-02-01), Poole et al.
patent: 20020127752 (2002-09-01), Thomson et al.
patent: 0475330 (1992-03-01), None
Lam et al “Plasam immersion Ar ion implantation induced disorder in strained InGaAsP multiple quantum wells” Electronic letters, Apr. 1998 vol. 34 No. 8.*
Poole et al “Bandgap tuning of semiconductor quantum well structures using ion implantation”, Sperlattices and Microstructures vol. 15, No. 4 1994.*
Poole, P.J. et al.: “Quantum Well Intermixing For the Realization Of Photonic Integrated Circuits”, Proceedings of the SPIE, SPIE, Bellingham, VA, vol. 2613, dated Oct. 24, 1995, pp. 9-16.
Zucker, J.E. et al.: “Large Blueshifting Of INGAAS/INP Quantum-Well Band Gaps By Ion Implantation”, Applied Physics Letters, American Institute of Physics, New York, vol. 60, No. 24, dated Jun. 15, 1992, pp. 3036-3038.
Tell, B. et al., “Phosphorous Ion Implantation Induced Intermixing of INGAAS-INP Quantum Well Structures”, Applied physics Letters, American Institute of physics, New York, vol. 54, No. 16, dated Apr. 17, 1989, pp. 1570-1572.
Ooi, B.S. et al.: The Application Of The Selective Intermixing In Selected Area (SISA) Technique To The Fabrication Of Photonic Devices In GAAS/ALGAAS Structures, International Journal of Optoelectronics, London, GB., vol. 10, No. 4, dated Jul. 1, 1995, pp. 257-263.
Kupka, R.K. et al.: “Gallium-Implantation-Enhanced Intermicing of Close-Surface GAAS/ALAS/ALGAAS Double-Barrier Quantum Wells”, Journal of Applied Physics, American Institute of Physics, New York, vol. 78, No. 4, dated Aug. 15, 1995, pp. 2355-2361.
Paquette, M. et al.: “Blueshifting Of INGAAP/INP Laser Diodes By Low-Energy Ion Implantation”, Applied Physics Letters, American Institute of Physics, New York, vol 71, No. 26, dated Dec. 29, 1997, pp. 3749-3751.
Yu, S.J. et al.: “Disordering Of INGASS/INP Superlattice And Fabrication Of Quantum Wires By Focused GA Ion Beam”, Journal of Vacuum Science and Technology: Part B, American Institute of Physics, New York, vol. 9, No. 5, dated Sep. 1, 1991, pp. 2683-2686.
Copy of the International Search Report from a foreign patent office in a counterpart foreign application.

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