Method for shaping the edges of slices of semiconductor material

Details Method for shaping the edges of slices of semiconductor material Method for shaping the edges of slices of semiconductor material

1988-06-22

1990-01-30

Chaudhuri, Olik

Fishing, trapping, and vermin destroying

51317, 156636, 156658, H01L 21304

Patent

active

048973696

ABSTRACT:
The invention concerns a method in which the edge of the slices is made to slide in contact with the surfaces of a pad soaked in acid substances and in which, during the process, the areas of the edge of the slices that have been in contact with the pad are periodically washed with a special liquid.

REFERENCES:
patent: 3951728 (1976-04-01), Egashira et al.
patent: 4588473 (1986-05-01), Hisatomi et al.
patent: 4756796 (1988-07-01), Saitou
Free, IBM Tech. Dis. Bull., vol. 19, No. 8 (Jan. 1977), pp. 3040-3041.
Craft, Circuits Manuf. (USA), vol. 17, No. 9 (Sep. 1977), pp. 47-50.

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