Metal working – Method of mechanical manufacture – Electrical device making
Reexamination Certificate
2006-10-31
2006-10-31
Kim, Paul D. (Department: 3729)
Metal working
Method of mechanical manufacture
Electrical device making
C029S603070, C029S603130, C029S603140, C029S603150, C029S603180, C360S125330, C360S317000, C427S127000, C427S128000, C451S005000, C451S041000, C216S065000
Reexamination Certificate
active
07127801
ABSTRACT:
A thin film magnetic head that includes an improved P2pole tip/yoke interface. The process for forming the P2pole tip/yoke interface includes a CMP polishing step that is performed on the surface of the wafer subsequent to the plating of the P2pole tip. This CMP step utilizes a relatively soft polishing pad and an acidic polishing slurry which preferentially attacks the P2pole tip material, such that the CMP step results in the recession of the upper surface of the P2pole tip relative to the dielectric layer surrounding it, as well as the significant rounding of the upper edges of the dielectric trench in which the P2pole tip is formed. Thereafter, when the yoke is plated onto the P2pole tip the rounded upper edges of the dielectric trench result in a concave curved interface between the yoke and the P2pole tip.
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Lahiri Ashok
Lee Edward Hin Pong
Lee Eric James
Xu Hong
Guillot Robert O.
Hitachi Global Storage Technologies - Netherlands B.V.
Intellectual Property Law Offices
Kim Paul D.
LandOfFree
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