Metal working – Method of mechanical manufacture – Electrical device making
Reexamination Certificate
2005-07-05
2005-07-05
Kim, Paul D (Department: 3729)
Metal working
Method of mechanical manufacture
Electrical device making
C029S603130, C029S603140, C029S603150, C029S603180, C360S122000, C360S125330, C360S317000, C360S318000, C360S234100, C360S234200, C360S234300, C451S005000, C451S041000
Reexamination Certificate
active
06912772
ABSTRACT:
A process for forming the P2pole tip/yoke interface of a magnetic head that includes a second CMP polishing step that is performed on the surface of the write head wafer subsequent to the plating of the P2pole tip thereon, and subsequent to a first CMP step. This second CMP step utilizes a relatively soft polishing pad and an acidic polishing slurry which preferentially attacks the P2pole tip material. This results in the recession of the upper surface of the P2pole tip relative to the dielectric layer surrounding it, and significant rounding of the upper edges of the dielectric trench in which the P2pole tip is formed. Thereafter, when the yoke is plated onto the P2pole tip the rounded upper edges of the dielectric trench result in a concave curved interface between the yoke and the P2pole tip.
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Lahiri Ashok
Lee Edward Hin Pong
Lee Eric James
Xu Hong
Guillot Robert O.
Hitachi Global Storage Technologies - Netherlands B.V.
Intellectual Property Law Offices
Kim Paul D
LandOfFree
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