Method for shape detection and apparatus therefor

Details Method for shape detection and apparatus therefor Method for shape detection and apparatus therefor

1993-10-20

1995-08-22

Evans, F. L.

Optics: measuring and testing

By polarized light examination

With light attenuation

25055922, G01B 1124

Patent

active

054445370

ABSTRACT:
A shape detecting arrangement allows a shape of an object to be very precisely detected at a high resolution, by projecting a plurality of light beams in mutually different ways onto an identical spot of the object substantially in an identical direction, forming on a position detector images of beams of the projected beams reflected back from the object, obtaining a ratio of intensity of the reflected beams by virtue of outputs from the position detector, obtaining positions of the respective reflected beams by virtue of variation component of the ratio of intensity with respect to a reference plane for detecting the position of the object, and finally obtaining height displacement of the respective positions obtained with respect to the reference plane on the basis of the positions and angles of incidence of the reflected beams into the position detector.

REFERENCES:
patent: 4088048 (1978-05-01), Burcher et al.
patent: 4443706 (1984-04-01), Di Matteo et al.

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