Electric heating – Metal heating – By arc
Reexamination Certificate
2005-07-05
2005-07-05
Paschall, Mark (Department: 3742)
Electric heating
Metal heating
By arc
C219S121410, C219S678000, C156S345410, C438S799000
Reexamination Certificate
active
06914208
ABSTRACT:
A batch-type etching method includes applying microwaves from the outside of a reaction chamber to semiconductor wafers after HF gas etching of the wafers to remove residual substances including H2O, CH3OH, CH3COOH and/or other by-products from surfaces of the wafers. Microwaves oscillate polar molecules of the substances and generate heat, thereby removing the substances.
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Nanba Kunitoshi
Shimizu Akira
ASM Japan K.K.
Knobbe Martens Olson & Bear LLP
Paschall Mark
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