Metal working – Method of mechanical manufacture – Electrical device making
Reexamination Certificate
2005-04-12
2005-04-12
Tugbang, A. Dexter (Department: 3729)
Metal working
Method of mechanical manufacture
Electrical device making
C029S025350, C029S597000, C029S602100, C029S609000, C310S31300R, C310S31300R, C428S619000
Reexamination Certificate
active
06877209
ABSTRACT:
One embodiment disclosed relates to a method for sealing an active area of a surface acoustic wave (SAW) device on a wafer. The method includes providing a sacrificial material over at least the active area of the SAW device, depositing a seal coating over the wafer so that the seal coating covers the sacrificial material, and replacing the sacrificial material with a target atmosphere. Another embodiment disclosed relates to an SAW device sealed at the wafer level (i.e. prior to separation of the die from the wafer). The device includes an active area to be protected, an electrical contact area, and a lithographically-formed structure sealing at least the active area and leaving at least a portion of the electrical contact area exposed.
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Bruner Mike
Green Gary
Miller Gregory D.
Ragan Lawrence Henry
Kim Paul
Okamoto & Benedicto LLP
Silicon Light Machines Inc.
Tugbang A. Dexter
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