Method for screening using electrostatic adhesion

Details Method for screening using electrostatic adhesion Method for screening using electrostatic adhesion

1995-12-22

1997-06-03

Ryan, Patrick

Adhesive bonding and miscellaneous chemical manufacture

Methods

Surface bonding and/or assembly therefor

156235, 156239, 156249, 156252, 1562722, 156289, 156344, 29830, 29831, 29837, 264430, B32B 3104, B32B 3128

Patent

active

056350007

ABSTRACT:
The present invention relates generally to a new apparatus and method for screening using electrostatic adhesion. More particularly, the invention encompasses an apparatus that uses an electrostatic charge during the screening process for a semiconductor substrate. Basically, a backing layer is adhered to a green ceramic sheet using an electrostatic charge, while the green ceramic sheet is processed.

REFERENCES:
patent: 3892614 (1975-07-01), Levy
patent: 3948706 (1976-04-01), Schmeckenbecher
patent: 4407007 (1983-09-01), Desai
patent: 4457972 (1984-07-01), Griffith et al.
patent: 4510000 (1985-04-01), Kumar
patent: 4546065 (1985-10-01), Amendola
patent: 4753694 (1988-06-01), Herron
patent: 5167997 (1992-12-01), Chamberlain et al.
patent: 5262207 (1993-11-01), Garner et al.
patent: 5356497 (1994-10-01), Lee
patent: 5480503 (1996-01-01), Casey
K. S. Desai et al., "Backing Material for MLC Screening", IBM Technical Disclosure Bulletin, vol. 24, No. 10 p. 5119 Mar. 1982.

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