Method for scanning optical interference patterns with line...

Details Method for scanning optical interference patterns with line... Method for scanning optical interference patterns with line...

2011-06-14

2011-06-14

Connolly, Patrick J (Department: 2877)

Optics: measuring and testing

By light interference

For dimensional measurement

C356S521000

Reexamination Certificate

active

07961333

ABSTRACT:
A method is provided for the electronic scanning of the intensity distribution of an optical interference pattern by means of a linear image sensor, wherein the interference pattern is produced by overlapping two temporally partly coherent beams striking at an arbitrarily predefined angle α in relation to one another and is provided with an interference strip having a carrier frequency greater than the scanning frequency, and amplitude modulation that can be varied slowly in relation to the pixel width, wherein at least one optical grating is disposed in the beam path of at least one of two incident beams and the image sensor is disposed in the diffraction image of the grating(s) such that, at the site of the image sensor, the beams interfere, and the beams enclose an angle β at the site of the image sensor, the angle being smaller than α.

REFERENCES:
patent: 5943133 (1999-08-01), Zeylikovich et al.
patent: 196 15 616 (1997-10-01), None
patent: 0 930 485 (1999-07-01), None
Koch et al., “Optical Coherence Tomography System with Extended Measurement Range”, Optics Letters, Optical Society of America, vol. 31, No. 19, Oct. 1, 2006, pp. 2882-2884.

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