Method for room temperature chemical vapor deposition on...

Coating processes – Solid particles or fibers applied – Uniting particles to form continuous coating with...

Reexamination Certificate

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C427S190000, C427S248100, C427S255290

Reexamination Certificate

active

08048483

ABSTRACT:
A method to deposit a thin film on a flexible polymer substrate at room temperature comprising heating source vapor, which is vaporized by an evaporator, in a shower head in a reaction chamber so that the source vapor is thermally decomposed to be converted into the nano-size single phase; and depositing the source vapor in the nano-size single phase on the flexible polymer substrate which is not separately heated.

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