Cleaning and liquid contact with solids – Processes – With work or work parts movable during treatment
Patent
1993-04-06
1995-12-12
Lewis, Michael
Cleaning and liquid contact with solids
Processes
With work or work parts movable during treatment
134 34, 134 42, 134902, 134182, 134183, B08B 300
Patent
active
054746167
ABSTRACT:
A plate-shaped article is immersed in a cleaning liquid filling a cleaning bath having an overflowing surface through which the cleaning liquid flows out, and is rinsed out. In the cleaning bath, streams mostly being directed away from a predetermined plane approximately perpendicular to the overflowing surface are formed. The plate-shaped article is then brought into the cleaning liquid having the stream maintaining a state where the plate-shaped article intersects the predetermined plane and the surfaces of the plate-shaped article are in approximately parallel to the streams mostly being directed away from the predetermined plane on the surface of the cleaning liquid.
REFERENCES:
patent: 4997490 (1991-03-01), Vetter et al.
patent: 5090432 (1992-02-01), Bran
Japanese patent abstract, Yukio Kanamori, Cleaning Method for . . . Substrate Feb. 13, 1992.
Hayami Yuka
Kobayashi Masanori
Yamazaki Ken
Dunn Jr. Thomas G.
Fujitsu Limited
Lewis Michael
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