Electric heating – Heating devices – With heating unit structure
Reexamination Certificate
2008-04-15
2008-04-15
Fuqua, Shawntina (Department: 3742)
Electric heating
Heating devices
With heating unit structure
C427S140000, C427S155000, C427S461000, C427S471000, C427S592000, C427S593000, C029S592100, C029S611000, C029S620000, C156S094000, C156S098000, C264S036210
Reexamination Certificate
active
07358465
ABSTRACT:
A ceramic heater for heating a semiconductor wafer under processing and has a layered structure wherein on one surface of a supporting substrate made of carbon or a carbon-based composite material, successively formed layers including an insulating layer, and electroconductive layer as an electric heating element and a dielectric layer. A first step for partly or completely removing the layer or layers having degraded properties by means of a suitable method such as sandblasting and a second step of re-forming the layer or layers having been removed in the first step. The invention allows for a substantial cost decrease as compared with the conventional way by replacing the worn-out ceramic heater with a newly manufactured one.
REFERENCES:
patent: 5053251 (1991-10-01), Hara et al.
patent: 7094450 (2006-08-01), Nagaraj et al.
Fuqua Shawntina
Lowe Hauptman & Ham & Berner, LLP
Shin-Etsu Chemical Co. , Ltd.
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