Method for resistor trimming by metal migration

Details Method for resistor trimming by metal migration Method for resistor trimming by metal migration

1984-10-18

1986-08-19

Ozaki, George T.

Metal treatment

Process of modifying or maintaining internal physical...

Chemical-heat removing or burning of metal

29584, 29585, 29586, 148187, 2041292, 204140, 357 51, 357 68, H01L 2124

Patent

active

046067817

ABSTRACT:
A method for trimming a diffused or implanted resistor located within an integrated circuit is disclosed. This technique for trimming a resistor requires the use of high current pulses and geometric shaped metal contacts. The current pulses react with the electropositive metal atoms in the thin film conductor and cause the metal atoms to migrate to another location, thus altering the value of the resistor by progressively decreasing the conductivity of the resistor.

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