Method for representing logical status changes of a plurality of

Details Method for representing logical status changes of a plurality of Method for representing logical status changes of a plurality of

1982-01-20

1984-09-11

Karlsen, Ernest F.

Electricity: measuring and testing

Measuring, testing, or sensing electricity, per se

With rotor

250310, 324 73R, 371 15, G01R 3100, G01N 2300, G06F 1132

Patent

active

044713029

ABSTRACT:
A method for representing logic changes of state occurring at a plurality of adjacent circuit nodes in an integrated circuit in the form of a logic image employs a pulsed electron probe which always scans a same path in the x-direction on the integrated circuit and the phase of the electron pulses comprising the pulsed electron probe is continuously shifted for each new scanning operation. The integrated circuit can be imaged up to the edge of a recording or field of view limit and it is only at this limit that the y-deflection of the pulsed electron probe is fixed. Very small spacings, such as those occurring between adjacent integrated circuit tracks, can thus be reliably imaged on the picture screen of the scanning electron microscope.

REFERENCES:
patent: 4220853 (1980-09-01), Feuerbaum et al.
patent: 4220854 (1980-09-01), Feuerbaum
patent: 4223220 (1980-09-01), Feuerbaum
patent: 4277679 (1981-07-01), Feuerbaum

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