Single-crystal – oriented-crystal – and epitaxy growth processes; – Processes of growth from liquid or supercritical state – Liquid phase epitaxial growth
Patent
1995-04-26
1997-08-05
Bowers, Jr., Charles L.
Single-crystal, oriented-crystal, and epitaxy growth processes;
Processes of growth from liquid or supercritical state
Liquid phase epitaxial growth
385130, 117 58, 117 90, 117106, 117948, 117918, H01L 2120
Patent
active
056542291
ABSTRACT:
A method for providing an nonlinear, frequency converting optical QPM waveguide device by growing a first ferroelectric oxide film or layer on a second ferroelectric layer or medium wherein, in first and second embodiments, respectively, the second layer is initially provided with a periodic nonlinear coefficient pattern or a periodic pattern comprising a seed layer. During the growth of the first layer, the periodic pattern formed in the second layer, is replicated, transformed or induced into the first layer resulting in a plurality of substantially rectangular prismatic-shaped domains in the first layer having the periodic nonlinear coefficient pattern status based upon the periodic patterning of the second layer. In a third embodiment, the periodic nonlinear coefficient pattern may be introduced into the first layer after completion of its growth, and the periodic nonlinear coefficient pattern status of the first layer, at the interface between the first and second layers, is transposed or migrated into the second layer forming a plurality of substantially rectangular prismatic-shaped domains in the second layer having the periodic nonlinear coefficient pattern status of the first layer. In the first and second embodiments, the optical QPM waveguide is the first layer and in the third embodiment, the optical QPM waveguide is the second layer.
REFERENCES:
patent: 4951293 (1990-08-01), Yamamoto et al.
patent: 5193023 (1993-03-01), Yamada et al.
patent: 5253259 (1993-10-01), Yamamoto et al.
patent: 5295218 (1994-03-01), Agostimelli et al.
patent: 5323023 (1994-06-01), Fork
patent: 5539569 (1996-07-01), Fukuda et al.
M.J. Angell, et al., Orientation Patterning of II-VI Semiconductor Films for Quasi-Phasematched Nonlinear Devices, Integrated Photonics Research 93 Palm Springs, pp. 472-474.
F. Armani, D. Delacourt, E. Lallier, M. Papuchon, Q. He, M. De Micheli and D. B. Ostrowsky, First Order Quasiphase Matching in LiNbO.sub.3, Electronics Letters vol. 28, No. 2, pp. 139-140 (1992).
Robert C. Baumann, Timothy A. Rost, Thomas A. Rabson, Electrical Characterization of Ferroelectric Thin Films of Lithium Niobate on Silicon Substrates, Mat. Res. Soc. Symp. Proc. vol. 200-Ferroelectric Thin Films, edited by E. Myers, et al., pp. 31-36 (1990).
W.K. Burns, Senior Member, IEE, W. McElhanon and L. Goldberg, Second Harmonic Generaltion in Field Poled, Quasi-Phase-Matched, Bulk LiNbO.sub.3, IEEE Photonics Technology Letters, vol. 6, No. 2, pp. 252-254 (Feb. 1994).
D. Delacourt, F. Armani, and M. Papuchon, Second-Harmonic Generation Efficiency in Periodically Poled LiNbO.sub.3 Waveguides, IEEE Journal of Quantum Electronics, vol. 30., No. 4, pp. 1090-1099 (Apr. 1994).
Martin M. Fejer, G. A. Magel, Dieter H. Jundt, and Robert L. Byer, Quasi-Phase Matched Second Harmonic Generation: Tuning and Tolerances, IEEE Journal of Quantum Electronics, vol. 28, No. 11, pp. 2631-2654, Nov. 1992.
Jeff Hecht, Semiconductor Diode Lasers Span the Rainbow, Laser Focus World, pp. 199-211 (Apr. 1993).
J.L. Jackel, C. E. Rice, and J.J. Veselka, Proton Exchange for High-Index Waveguides in LiNbO.sub.3, Appl. Phys. Lett. 41(7), pp. 607-608 (1992).
E.J. Lim, M.M. Fejer, R.L. Byer and W.J. Kozlovsky, Blue Light Generation by Frequency Doubling in Periodically Poled Lithium Niobate Channel Waveguide, Electronics Letters, vol. 25, No. 11, pp. 731-732 (1989).
R.S. Madoyan and O.A. Khachaturyan, Domain and Dislocation Structure of Lithium Niobate Epitaxial Film, Sov. Phys. Solid State 29(9), pp. 1578-1580 (Sep. 1987).
Kiminori Mizuuchi, and Kazuhisa Yamamoto, Domain Inversion in LiTaO.sub.3 Using Proton Exchange Followed by Heat Treatment, J. Appl. Phys. 75(3), pp. 1311-1318 (1994).
Hiroshi Momiji, Kazumi Kawamoto, and Kenchi Ito, Fabrication of a Periodically Domain-Inverted Structure in LiNbO.sub.3 Thin Film by a Domain Transfer Technique, Appl. Phys. Lett. 65(17), pp. 2154-2155, (1994).
Kiyoshi Nakamura, Haruyasu Ando, and Hiroshi Shimizu, Ferroelectric Domain Inversion Caused in LiNbO.sub.3 Plates by Heat Treatment, Appl. Phys. Lett. 50(20), pp.1413-1414 (1987).
Derek W. Nam and Robert G. Waarts, Advanced Laser Diodes Bring Compact Blue-Green Sources to Light, Laser Focus World, pp. 49-55 (Aug. 1994).
Timothy A. Rost, He Lin, and Thomas A. Rabson, Electrical Switching in Lithium Niobate Thin Films, International Symposium on Integrated Ferroelectrics 1991, pp. 644-648.
Hitoshi Tamada, Atsuo Yamada, and Masaki Saitoh, LiNbO.sub.3 Thin-Film Optical Waveguide Grown by Liquid Phase Epitaxy and Its Application to Second-Harmonic Generation, J. Appl. Phys. 70(5), pp. 70(5), pp. 2536-2541 (1991).
Atsuo Yamada, Hitoshi Tamada and Masaki Saitoh, Liquid Phase Epitaxial Growth of LiNbO.sub.3 Thin Film Using Li.sub.2 O-B.sub.2 O.sub.3 Flux System, Journal of Crystal Growth (North Holland)132, pp. 48-60 (1993).
Amnon Yariv, Quantum Electronics Third Edition, Chapter 16 ("Introduction to Nonlinear Optics-Second-Harmonic Generation"), pp. 378-406 (1989).
Bringans Ross D.
Fork David K.
Geels Randall S.
Kingston John J.
Leplingard Florence E.
Bowers Jr. Charles L.
Paladugu Ramamohan Rao
Xerox Corporation
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