Method for repairing surface defects

Details Method for repairing surface defects Method for repairing surface defects

1998-01-22

2000-07-11

Bowers, Charles

Semiconductor device manufacturing: process

Including control responsive to sensed condition

Electrical characteristic sensed

438 4, 438758, 438761, 438773, B24B 100

Patent

active

060871911

ABSTRACT:
A method for repairing defects in a surface layer of a substrate. The method comprises the redeposition, in a solvent environment, of a fill material into the defects of the surface layer. The fill material is provided by the surface layer itself or from a separate source comprising a different material from that of the surface layer.

REFERENCES:
patent: 4116714 (1978-09-01), Basi
patent: 4129457 (1978-12-01), Basi
patent: 4135952 (1979-01-01), Anderson et al.
patent: 5217566 (1993-06-01), Pasch et al.
patent: 5643649 (1997-07-01), Hagan et al.
patent: 5934978 (1999-08-01), Burke et al.

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