Coating processes – Restoring or repairing
Patent
1993-01-05
1994-10-18
Bell, Janyce
Coating processes
Restoring or repairing
427165, 427307, 427404, 427554, 427556, B32B 3500, B05D 506
Patent
active
053566629
ABSTRACT:
The invention in one aspect involves a method for repairing an optical system. The optical system includes at least one optical element which comprises, in turn, a substrate having a principal surface, and a multilayer coating overlying the principal surface. The substrate comprises a first material, and the multilayer coating comprises plural second and at least third material layers in alternation. The method includes the steps of removing the multilayer coating from the substrate, and redepositing a new multilayer coating on the substrate. The old multilayer coating is removed in a single etching step while preserving the quality of the principal surface to such an extent that the peak reflectivity of the new multilayer coating is at least 80% the reflectivity of the old multilayer coating.
In a second aspect, the invention involves a method for repairing an optical system of the kind described above, in which the optical element comprises a substrate having a principal surface, a layer of chromium overlying the principal surface, and a first layer of iridium overlying the chromium layer. The method comprises the steps of removing the first iridium layer from the substrate; and forming a second iridium coating on the substrate. The iridium layer is removed by exposing the iridium and chromium layers to an aqueous solution comprising potassium ferricyanide and sodium hydroxide, resulting in substantial dissolution of the chromium layer.
REFERENCES:
patent: 4129463 (1978-12-01), Cleland et al.
patent: 4260451 (1981-04-01), Schmeckenbecher
patent: 5003567 (1991-03-01), Hawryluk et al.
patent: 5165954 (1992-11-01), Parker et al.
D. W. Berreman et al., "Soft x-ray projection lithography: printing of 0.2-um features using a 20:1 reduction", Optics Letters, vol. 15, No. 10, May 15, 1990, 529-531.
N. M. Ceglio, et al., "Soft X-Ray Projection Lithography System Design", OSA Proceedings on Soft-X-Ray Projection Lithography, 1991, vol. 12.
J. Bokor, ed., Optical Society of America (1991) 5-10 (mo. unavailable).
D. P. Gaines, et al., "Repair of high performance multilayer coatings", SPIE vol. 1547 Multilayer Optics for Advanced X-Ray Applications, (1991) 228-238 (mo. unavailable).
D. L. Windt, et al., "Interface Imperfections in Metal/Si X-Ray Multilayer Structures", O.S.A. Proc. on Soft-X-Ray Projection Lithography 12, (1991) 82-86 (mo. unavailable).
T. A. Shankoff et al., "High Resolution Tungsten Patterning Using Buffered, Mildly Basic Etching Solutions", J. Electrochem. Soc.: Solid-State Science and Technology 122 (1975) 294-298 (mo. unavailable).
Early Kathleen R.
Tennant Donald M.
Waskiewicz Warren K.
Windt David L.
AT&T Bell Laboratories
Bell Janyce
Finston Martin I.
LandOfFree
Method for repairing an optical element which includes a multila does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Method for repairing an optical element which includes a multila, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method for repairing an optical element which includes a multila will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-2370877