Method for repairing a photomask, method for inspecting a...

Details Method for repairing a photomask, method for inspecting a... Method for repairing a photomask, method for inspecting a...

2005-02-01

2005-02-01

Mohamedulla, Saleha R. (Department: 1756)

Radiation imagery chemistry: process, composition, or product th

Radiation modifying product or process of making

Radiation mask

C382S144000

Reexamination Certificate

active

06849363

ABSTRACT:
A method for inspecting a photomask, comprising generating a laser beam, changing a phase of the laser beam to smooth the brightness distribution of the laser beam, applying the smoothed laser beam to the photomask, acquiring an image of the photomask using a sensor while the laser beam and the photomask are relatively moved, examining the image of the photomask for a defect of the mask-pattern of the photomask.

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S. Wolf and R.N. Tauber, “Silicon Processing for the VLSI Era”Lithography II: Optical Aligners and Photomasks, p. 630-635.

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