Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
Reexamination Certificate
2007-01-02
2007-01-02
Rosasco, S. (Department: 1756)
Radiation imagery chemistry: process, composition, or product th
Radiation modifying product or process of making
Radiation mask
Reexamination Certificate
active
10703298
ABSTRACT:
A method for repairing at least one defect of a light-influencing structure on a photolithographic mask with a mask substrate, in particular a quartz substrate, characterized in that in the region of at least one defect, gallium ions are radiated in a targeted manner for the purpose of implantation into the mask substrate and/or for the purpose of sputtering away material from the mask substrate. Furthermore, the invention relates to a photolithographic mask with a defect repaired in this way. As a result, defects in a light-influencing structure of a mask can be reliably repaired, and are repaired, respectively.
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Infineon - Technologies AG
Rosasco S.
Slater & Matsil L.L.P.
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