Method for removing trace metal contaminants from organic dielec

Details Method for removing trace metal contaminants from organic dielec Method for removing trace metal contaminants from organic dielec

1992-12-02

1994-07-26

Albritton, C. L.

Electric heating

Metal heating

By arc

21912186, B23K 2616

Patent

active

053328795

ABSTRACT:
A technique is described for the removal of trace metal contaminants from organic dielectrics such as polyimide. Pulsed ultraviolet radiation is used to remove the contaminants from the dielectric, regardless of their chemical nature, by the process of ablation. The process allows prepatterned bulk metal features to be simultaneously exposed to the pulsed radiation and yet remain unaffected.

REFERENCES:
patent: 4980536 (1990-12-01), Asch et al.
patent: 4987286 (1991-01-01), Allen
patent: 5037506 (1991-08-01), Gupta et al.

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