Method for removing silane compounds from silane-containing exha

Chemistry of inorganic compounds – Modifying or removing component of normally gaseous mixture

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Details

423240, 4232451, 4232452, 556470, 556471, C01B 700, B01D 800, B01D 4700

Patent

active

049236873

ABSTRACT:
A method for removing silane compounds from exhaust gases containing silanes comprises treating the silane containing gas with a metal alcholate in alcoholic solution to form a tetraalkoxysilane.

REFERENCES:
patent: 4313916 (1982-02-01), Jones et al.
patent: 4631183 (1986-12-01), Lalancette et al.
patent: 4784837 (1988-11-01), Kitayama et al.

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