Method for removing particles from elements installed in a...

Details Method for removing particles from elements installed in a... Method for removing particles from elements installed in a...

2006-12-26

2006-12-26

El-Arini, Zeinab (Department: 1746)

Cleaning and liquid contact with solids

Processes

Including use of vacuum, suction, or inert atmosphere

C134S030000, C134S037000

Reexamination Certificate

active

07153372

ABSTRACT:
Gas is introduced prior to a flooding process of a vacuum chamber of a vacuum installation, into coverings of elements, which coverings can be ventilated such that solid bodies are blown out of said coverings thereby preventing a penetration of said solid bodies into the coverings.

REFERENCES:
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patent: 5328555 (1994-07-01), Gupta
patent: 2003/0046968 (2003-03-01), Potthoff
patent: 2005/0082000 (2005-04-01), Moriya et al.
patent: 2005/0211821 (2005-09-01), Hein et al.
patent: 88 13 091 (1988-12-01), None
patent: 37 33 448 (1989-03-01), None
patent: 39 19 425 (1990-12-01), None
patent: 0-470 332 (1992-02-01), None

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