Method for removing metal impurities from resist components

Details Method for removing metal impurities from resist components Method for removing metal impurities from resist components

1991-09-03

1995-08-29

Schofer, Joseph L.

Synthetic resins or natural rubbers -- part of the class 520 ser

Synthetic resins

Treating polymer containing material or treating a solid...

528486, 521 28, 430190, 430191, 430192, C08F 608

Patent

active

054461251

ABSTRACT:
A method of removing metal impurities from a resist component, comprising the steps of:

REFERENCES:
patent: 3067172 (1962-12-01), Carlstrom
patent: 3509084 (1970-04-01), Anspon et al.
patent: 4033909 (1977-07-01), Papa
patent: 4070313 (1978-01-01), Papa
patent: 4518760 (1985-05-01), Smith et al.
patent: 4537937 (1985-08-01), Cawlfield et al.
patent: 4871779 (1989-10-01), Killat Et al.
patent: 4965167 (1990-10-01), Salamy

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