Method for removing impurities from resist components and novola

Details Method for removing impurities from resist components and novola Method for removing impurities from resist components and novola

1991-09-03

1995-01-03

Kight, III, John

Synthetic resins or natural rubbers -- part of the class 520 ser

Synthetic resins

Treating polymer containing material or treating a solid...

528481, 528482, 528492, 528502, 210638, 210660, 210661, 210679, 210681, 210683, 210685, 210686, 210692, C08F 608

Patent

active

053788028

ABSTRACT:
A method of removing ionic impurities from a resist component, comprising the steps of:

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patent: 4965167 (1990-10-01), Salamy
Toray Product Brochure for TIN-100, TIN-200, and TIN-600 1 page only.
T. Yoshioka and M. Shimamura, "Studies of Polystyrene-based Ion Exchange Fiber. I. The Preparation and Fundamental Characteristics of Polystyrene-based Ion Exchange Fiber" Bull. Chem. Soc. Japan, 56, 3776-3729 (1983).

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