Method for removing harmful components in an exhaust gas

Details Method for removing harmful components in an exhaust gas Method for removing harmful components in an exhaust gas

2006-02-28

2006-02-28

Nguyen, Ngoc-Yen (Department: 1754)

Chemistry of inorganic compounds

Modifying or removing component of normally gaseous mixture

Halogenous component

C423S245100, C588S312000, C588S313000, C588S316000, C588S317000, C588S318000, C588S319000

Reexamination Certificate

active

07005117

ABSTRACT:
A method of removing harmful components of a perfluorocarbon gas or a perfluorocompound including the step of mixing at least one of a hydrocarbon gas and NH3gas with an exhaust gas containing a perfluorocarbon or a perfluorocompound discharged from manufacturing equipment. The method also includes the step of thermally decomposing the resulting mixed gas in a non-oxidizing atmosphere.

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