Distillation: processes – separatory – With disparate physical separation – Utilizing solid sorbent
Reexamination Certificate
2006-09-19
2006-09-19
Manoharan, Virginia (Department: 1764)
Distillation: processes, separatory
With disparate physical separation
Utilizing solid sorbent
C203S014000, C210S664000, C528S010000, C556S466000
Reexamination Certificate
active
07108771
ABSTRACT:
A process for reducing the level(s) of water and/or other impurities from cyclosiloxanes by either azeotropic distillation, or by contacting the cyclosiloxane compositions with an adsorbent bed material. The purified cyclosiloxane material is useful for forming low-dielectric constant thin films having dielectric constants of less than 3.0, more preferably 2.8 to 2.0.
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Battle Scott
Baum Thomas H.
Borovik Alexander S.
Laxman Ravi K.
Lin James T. Y.
Advanced Technology & Materials Inc.
Chappuis Margaret
Hultquist Steven J.
Intellectual Property / Technology Law
Manoharan Virginia
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