Fishing – trapping – and vermin destroying
Patent
1990-10-29
1991-10-15
Chaudhuri, Olik
Fishing, trapping, and vermin destroying
324719, H01L 2178
Patent
active
050574418
ABSTRACT:
Disclosed is a method for manufacturing an integrated circuit which includes the step of evaluating the reliability of metal films in the circuit using a noise measurement technique. In one embodiment, a film portion to be tested is incorporated in a Wheatstone bridge. A relatively large direct current is passed through the film to stimulate 1/f.sup.2 noise. A relatively small alternating current is concurrently passed through the film. The bridge imbalance signal at the ac frequency is amplified and demodulated by a phase-locked amplifier, and is then frequency analyzed. The film is evaluated by comparing the resulting noise power spectrum with predetermined standards.
REFERENCES:
Applied Physics Letters, vol. 23, No. 6, 1973, "Screening of Metal Film Defects by Current Noise Measurements," by J. L. Vossen, pp. 287-289.
Physical Review B, vol. 31, No. 2, 1985, "Direct Link Between 1/f Noise and Defects in Metal Films," by D. M. Fleetwood and N. Giordano, pp. 1157-1159.
IEEE International Reliability Physics Symposium, 1988, "A Comparison Between Noise Measurements and Conventional Electromigration Reliability Testing," by J. G. Cottle and T. M. Chen and K. P. Rodbell, pp. 203-208.
IEEE Computer Society Test Technology Committee Curriculum For Test Technology, 1983, "Noise Measurement as a Testing Tool," by Andrzej Peczalski, pp. 37-40.
Solid State Electronics, vol. 32, No. 1, "A Study of Electromigration in Aluminum and Aluminum-Silicon Thin Film Resistors Using Noise Technique," by A. Diligenti, P. E. Bagnoli, B. Neri, S. Bea and L. Mantellassi, pp. 11-16, (1989).
IEEE Transactions on Electron Devices, ED-34, 1987, "Electromigration and Low-Frequency Resistance Fluctuations in Aluminum Thin-Film Interconnections," by Bruno Neri, Alessandro Deligenti, and Paolo Emilio Bagnoli, pp. 2317-2321.
Rev. Sci. Instrum., vol. 58, 1987, "AC Method for Measuring Low-Frequency Resistance Fluctuation Spectra," by John H. Scofield, pp. 985-993.
Gutt Gregory M.
Kamgar Avid
Knoell Robert V.
Schutz Ronald J.
AT&T Bell Laboratories
Chaudhuri Olik
Finston M. I.
Graybill David E.
Pacher E. E.
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