Method for regulating the evaporation rate of oxidizable substan

Details Method for regulating the evaporation rate of oxidizable substan Method for regulating the evaporation rate of oxidizable substan

1979-08-09

1981-09-01

Hoffman, James R.

Coating processes

Electrical product produced

Integrated circuit, printed circuit, or circuit board

427162, 427164, 427166, 427167, 4272553, B05D 100, B05D 506

Patent

active

042872243

ABSTRACT:
A process for regulating the evaporation rate of oxidizable substances in reactive vacuum deposition by the metered addition of oxygen to a vacuum deposition chamber during deposition, wherein the addition of oxygen to a predetermined value, the pressure "p" in the vacuum chamber is measured, and the evaporation rate "r" for any pressure changes is regulated such that the ratio of pressure to evaporation rate p:r is maintained substantially constant.

REFERENCES:
patent: 3982049 (1976-09-01), Mee et al.

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