Coating processes – Measuring – testing – or indicating – Thickness or uniformity of thickness determined
Patent
1975-03-11
1978-01-10
Hoffman, James R.
Coating processes
Measuring, testing, or indicating
Thickness or uniformity of thickness determined
427 8, G05D 503, G05F 166, B05D 100
Patent
active
040680169
ABSTRACT:
An arrangement for regulating the evaporation rate and the layer buildup in the production of optically effective thin layers in a vacuum on substrates with controlled evaporator power and with continuous measuring of the optical characteristics of the deposited layer. The evaporation is started with a given evaporator power and with the start of change of the optical characteristics of the layer, the measured result after forming the time derivative is continuously compared with the output signal of a signal generator. This output signal reproduces the time rate of change of the optical properties during the layer buildup. The difference signal of the comparison signal is used to increase the evaporator power if the layer buildup lags, and to reduce this power if the layer buildup is too fast.
REFERENCES:
patent: 3347701 (1967-10-01), Yamagishi et al.
patent: 3382842 (1968-05-01), Steckelmacher
patent: 3636916 (1972-01-01), Thelen et al.
patent: 3670693 (1972-06-01), Rorick et al.
patent: 3773548 (1973-11-01), Baker et al.
patent: 3853093 (1974-12-01), Baker et al.
Hoffman James R.
Padlon Joseph F.
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