Method for registration of shadow masked thin-film patterns

Details Method for registration of shadow masked thin-film patterns Method for registration of shadow masked thin-film patterns

1985-10-23

1988-05-24

Childs, Sadie L.

Coating processes

Coating by vapor, gas, or smoke

118504, 118505, 118720, 118721, 2041921, 427255, 427272, 427282, 427294, C23C 1604

Patent

active

047465484

ABSTRACT:
A method of aligning thin-film structure patterns on a substrate formed with the use of an apertured mask in a vacuum deposition system. The present method includes the steps of positioning a mask holder assembly within a deposition chamber, the mask holder assembly having the apertured mask as part thereof and having means for engaging a substrate carrier; positioning a substrate carrier within the deposition chamber spaced from the mask holder assembly, the carrier having the substrate supported therein and having means for aligning the apertured mask with the substrate; engaging the mask holder assembly with the substrate carrier such that they are in operative contact; positioning a magnet in the deposition chamber adjacent the side of the substrate carrier opposite the mask holder assembly such that the apertured mask is held in operative contact with the substrate; vacuum-depositing a thin-film structure material through the apertured mask; and removing the magnet from the substrate carrier and disengaging the mask holder assembly from the substrate carrier, thereby resulting in the formation of the thin-film structures on the substrate.

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Tannas et al, "ACTFEL Displays".

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