Chemistry: electrical and wave energy – Processes and products
Patent
1993-12-15
1994-10-11
Niebling, John
Chemistry: electrical and wave energy
Processes and products
204102, 204131, 2041824, C02F 1461, C25B 100
Patent
active
053544340
ABSTRACT:
Waste solution of developer, used as developer for a positive type photo resist and containing tetraalkylammonium hydroxide is neutralized with carbon dioxide, and it is filtered through a separation membrane. After removing precipitates of insoluble organic substances, it is sent to an anode chamber of an electrolytic cell divided by a cation exchange membrane, and electrolysis is performed. Low grade organic compounds in aqueous solution of tetraalkylammonium hydroxide obtained from a cathode chamber of a first stage electrolytic cell are oxidized and decomposed and are then supplied to an anode chamber of the next stage electrolytic cell, and high purity tetraalkylammonium hydroxide aqueous solution is obtained from the cathode chamber. Or, the solution is sent to an anode chamber of a multi-chamber electrolytic cell, where a plurality of ion exchange membranes are furnished and an intermediate chamber is provided between the anode chamber and the cathode chamber, low grade organic substances in the intermediate chamber are oxidized and decomposed, and high purity tetraalkylammonium hydroxide aqueous solution is obtained from the cathode chamber through electrolysis.
REFERENCES:
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patent: 4536269 (1985-08-01), Chlanda et al.
patent: 4714530 (1987-12-01), Hale et al.
patent: 4752363 (1988-06-01), Buckley et al.
patent: 4917781 (1990-04-01), Sharifian et al.
patent: 5089096 (1992-02-01), Rijkhof et al.
Fukui Motoko
Kawakami Chisako
Satoh Hitoshi
Chlorine Engineers Corp. Ltd.
Niebling John
Phasge Arun S,.
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