Method for reducing ESD and imaging damage during focused ion be

Details Method for reducing ESD and imaging damage during focused ion be Method for reducing ESD and imaging damage during focused ion be

1997-12-29

2000-10-24

Nguyen, Nam

Dynamic magnetic information storage or retrieval

Head

Magnetoresistive reproducing head

20419234, 20419232, 20419235, 20419236, G11B 5127

Patent

active

061376604

ABSTRACT:
A magnetoresistive read/recording head for use in a fixed disk drive data storage device is formed by the steps of first, photolithographically depositing the head on one surface of a slider block, second, applying, a conductive film preferably of carbon or a silicon/carbon multi-layer film over the head and onto the block surface, and then milling the write tip portion of the head with a focused ion beam. The remaining conductive film is then removed in an oxygen plasma which chemically removes the remaining conductive film. The conductive layer is transparent to the focused ion beam and conducts electrostatic charge away from the head during the milling operation thus preventing electrostatic discharges from occurring which otherwise would damage the head.

REFERENCES:
patent: 5141623 (1992-08-01), Cohen et al.
patent: 5200056 (1993-04-01), Cohen et al.
patent: 5314596 (1994-05-01), Shukovsky et al.
patent: 5465186 (1995-11-01), Bajorek et al.
patent: 5618639 (1997-04-01), Ohno et al.
patent: 5635037 (1997-06-01), Chu et al.
patent: 5681426 (1997-10-01), Schultz et al.
patent: 5752309 (1998-05-01), Partee et al.
patent: 5804085 (1998-09-01), Wu et al.
patent: 5835315 (1998-11-01), Cohen et al.
patent: 5916423 (1999-06-01), Westwood
patent: 5985104 (1999-11-01), Westwood

Affiliated with

Also associated with

Rating

Method for reducing ESD and imaging damage during focused ion be does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method for reducing ESD and imaging damage during focused ion be, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method for reducing ESD and imaging damage during focused ion be will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1971037