Method for reducing diffusion through ferromagnetic materials

Details Method for reducing diffusion through ferromagnetic materials Method for reducing diffusion through ferromagnetic materials

2008-05-13

2008-05-13

Wilczewski, M. (Department: 2822)

Semiconductor device manufacturing: process

Having magnetic or ferroelectric component

C365S173000, C360S324200

Reexamination Certificate

active

10963579

ABSTRACT:
A method and apparatus are disclosed for inhibiting diffusion of mobile atoms from an antiferromagnetic layer toward a tunnel oxide layer and through a ferromagnetic layer which is pinned by the antiferromagnetic layer. Diffusion of the mobile atoms is inhibited by an oxide layer provided between the anti-ferromagnetic layer and the ferromagnetic layer. Alternatively, the ferromagnetic layer can have boron atoms located on or in the layer to fill interstices.

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