Single-crystal – oriented-crystal – and epitaxy growth processes; – Forming from vapor or gaseous state – Including change in a growth-influencing parameter
Patent
1998-04-06
2000-06-27
Kunemund, Robert
Single-crystal, oriented-crystal, and epitaxy growth processes;
Forming from vapor or gaseous state
Including change in a growth-influencing parameter
117109, 117915, C30B 2300
Patent
active
060802405
ABSTRACT:
Crystal of sublimable material is recovered by introducing a reaction gas containing sublimable material into a vertical recovery chamber kept at a temperature near a depositing temperature of the sublimable material to form a crystal deposit of the sublimable material on a surface of a wall of the chamber, and cooling the wall formed with the crystal deposit to a temperature below the previous temperature to cause a contraction difference between the crystal deposit and the wall formed with the crystal deposit, and break away the deposited crystal from the wall.
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Patent Abstracts of Japan, vol. 016, No. 425 (C-0982), Sep. 7, 1992, JP 04 145 991, May 19, 1992.
Sogabe Hideki
Uchida Hiroshi
Yabuuchi Teruaki
Kunemund Robert
Nippon Shokubai Co. , Ltd.
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