Method for realizing high frequency/speed field emission devices

Details Method for realizing high frequency/speed field emission devices Method for realizing high frequency/speed field emission devices

1993-01-22

1994-06-14

Bradley, Paula A.

Electric lamp or space discharge component or device manufacturi

Process

With assembly or disassembly

445 50, 313336, H01J 130, H01J 902

Patent

active

053205707

ABSTRACT:
An improved method of manufacturing high performance field emission devices is set forth which provides for high frequency and high switching speed operation. A field emission device employing an electron emitter is disposed on a projection provides for significant reduction in interelectrode capacitance. A method for forming the improved field emission device includes selective etching of one of the substrate and conductive/semiconductive materials to provide a projection or plurality of projections on which the electron emitter(s) is (are) disposed. The projections may be on the order of 100 .mu.m in extent.

REFERENCES:
patent: 4379979 (1983-04-01), Thomas et al.
patent: 5053673 (1991-10-01), Tomii et al.
patent: 5164632 (1992-11-01), Yoshida et al.
patent: 5249340 (1993-10-01), Kane et al.

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