Data processing: generic control systems or specific application – Specific application – apparatus or process – Specific application of control based on elapsed time
Reexamination Certificate
2005-03-15
2005-03-15
Picard, Leo (Department: 2125)
Data processing: generic control systems or specific application
Specific application, apparatus or process
Specific application of control based on elapsed time
C700S028000, C700S046000, C700S121000, C356S369000
Reexamination Certificate
active
06868312
ABSTRACT:
Method for real-time control of the fabrication of a thin-film structure comprising a substrate by ellipsometric measurement in which:variables directly linked to the ellipsometric ratio ρ=tanΨ exp(iΔ) are measured; andthe said variables are compared with reference values. The comparison relates to the length of the path traveled at a time t in the plane of the variables with respect to an initial point at time t0, for each layer participating in the thin-film structure.
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Search Report issued in French Application No. 00 10532.
Drevillon Bernard
Heitz Thibaut
Rostaing Jean-Christophe
Burns Doane Swecker & Mathis L.L.P.
L'Air Liquide Societe Anonyme a Directoire et Conseil de Surveil
Picard Leo
Rodriguez Carlos Ortiz
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