Hazardous or toxic waste destruction or containment – Containment – Solidification – vitrification – or cementation
Patent
1993-08-19
2000-07-04
Dunn, Tom
Hazardous or toxic waste destruction or containment
Containment
Solidification, vitrification, or cementation
423210, B01D 5334
Patent
active
060841486
ABSTRACT:
A method for reacting a pyrophoric gas is disclosed. In the method, a stream of spent process gas from, for example, a chemical vapor deposition process containing silane is mixed with the oxidizing gas flow such as air. The combined flow is sufficiently turbulent to provide for a controlled reaction of the silane. The method may be used for a wide range of pyrophoric gas flow rates, such that the risk of explosion is eliminated. The reaction between silane and oxygen occurs spontaneously. Because the reaction proceeds spontaneously, no ignitor is necessary. Additionally, the method requires no external fuel source and, due to the turbulence proceeds even in conditions were no flame is generated.
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Morgan Daniel G.
Shiban Samir S.
Dunn Tom
Hendrickson Stuart L.
Intel Corporation
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