Method for quickly quantifying the resistance of a thin film...

Data processing: measuring – calibrating – or testing – Measurement system in a specific environment – Electrical signal parameter measurement system

Reexamination Certificate

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C324S754120, C356S432000, C428S336000, C702S057000

Reexamination Certificate

active

07552018

ABSTRACT:
The present invention provides a baseline function, viz., a transmission-related parameter (transmission loss, transmission coefficient, etc.) as a function of resistance of a uniformly resistant finitely thin film—which is predicated on the theoretical behavior of electromagnetic radiation passing through a uniformly resistant infinitely thin film. This theoretical behavior is characterized by constancy of the transmission-related parameter for any frequency of the electromagnetic radiation, wherein each resistance value has associated therewith a constant transmission-related parameter. The baseline function is formed by calculating the constant transmission-related parameter value for each of plural resistance values in the theoretical model. The baseline function is correlated with an empirical function, viz., a transmission-related parameter as a function of frequency of the electromagnetic radiation—which is formed, in empirical testing, by measuring the transmission-related parameter value for each of plural resistance values. The correlation yields a functional relationship between resistance and frequency.

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R. J. Collier and D. G. Hasko, “Measurement of the Sheet Resistance of Resistive Films on Thin Substrates from 120 to 175 GHz Using Dielectric Waveguides,” Journal of Applied Physics, vol. 91, No. 4, Feb. 15, 2002, pp. 2547-2549.

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