Radiant energy – Photocells; circuits and apparatus – Optical or pre-photocell system
Patent
1987-12-10
1989-05-30
Nelms, David C.
Radiant energy
Photocells; circuits and apparatus
Optical or pre-photocell system
356382, G01N 2186
Patent
active
048354023
ABSTRACT:
A method for quantitatively determining the shape of a pattern in a layer formed on a substrate comprising several steps is disclosed. The method includes acquiring by means of an optical microscope an image i(X) of said object, the focussing being made at an arbitrary height, calculating through a Fourier transform the frequency spectrum I(X) corresponding to the image, calculating a model M(X) corresponding to an object having a width L, to an optical microscope having characteristic functions T(X) and P(X), and to parameters a and b characterizing the reflective power of the object with respect to the substrate according to the formula:
REFERENCES:
patent: 4640620 (1987-02-01), Schmidt
patent: 4677302 (1987-06-01), Chiu et al.
patent: 4707610 (1987-11-01), Lindow et al.
"Optical Profile Transducer", Sawatari et al., Proceedings of the Society of Photo Optical Instrumentation Engineers 8/1978, pp. 8-13.
M. E. Guillaume "Fourier Transform Method for Optical Linewidth Measurement", SPIE vol. 80 (1984) pp. 71-77.
M. E. Guillaume, "Accurate Image Modeling for Submicron CD Optical Control." Microelectronic Engineering 6 (1987), pp. 631-636.
M. E. Guillaume, et al.: "Evaluation of a Fourier Transform Method for Accurate Critical Dimension Measurements," Microelectronic Engineering, vol. 3, No. 1/4, Dec. 1985, pp. 211-218.
R. T. Gallagher: "IC Testing: A New Way to Measure Submicron Line Widths," Electronics, vol. 59, No. 8, Feb. 1986, pp. 22, 23.
LandOfFree
Method for quantitatively determining the shape of small size pr does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Method for quantitatively determining the shape of small size pr, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method for quantitatively determining the shape of small size pr will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-2154831