Radiant energy – Infrared-to-visible imaging
Patent
1989-03-01
1991-12-31
Hannaher, Constantine
Radiant energy
Infrared-to-visible imaging
250341, 356 30, 356432, G01N 2100
Patent
active
050774751
ABSTRACT:
Disclosed is a quantitative evaluation method of optical absorption image which applies rays of light to a sample to obtain a quantitative optical absorption image without using destructive inspection and which can measure automatically and easily the dispersion of resistivity of the sample by calculating the mean value and standard deviation of the quantitative optical absorption image.
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Katsumata et al., "Observation of Micro Defects in GaAs Crystal by VE-IRT Method" Research Report of No 27 Research Meeting, No. 145 Committee of the Japan Society For The Promotion of Science, 2/1985 pp. 54-59.
Karsumata et al., "Measurement Method For Detecting The Distribution of Micro Defects in a GaAs Wafer," Semiconductor World, Jun. 1985 pp. 75-85.
F. W. Voltmer and H. J. Ruiz, National Bureau of Standards Special Publication 400-10, Spreading Resistance Symposium, Proceedings of a Symposium Held at NBS, Gathersburg, MD., Jun. 13-14 1976 pp. 191-199.
Hirai Katsuyuki
Kimura Mikio
Moriya Kazuo
Glick Edward J.
Hannaher Constantine
Mitsui Mining & Smelting Co. Ltd.
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