Method for quality control and yield enhancement

Details Method for quality control and yield enhancement Method for quality control and yield enhancement

1998-06-02

2000-11-14

Hoff, Marc S.

Data processing: measuring, calibrating, or testing

Measurement system in a specific environment

Quality evaluation

702180, 702181, 702182, G06F 1500

Patent

active

061482684

ABSTRACT:
An efficient method for optimization of product characteristics or manufacturing processes. The method utilized a Chi-square model to identify error sources that contribute to the product or process variability. The method is particularly useful for evaluation of processes related to optics and electronics fabrication but also has application in fields where a chi-square distribution is observed.

REFERENCES:
patent: 5134574 (1992-07-01), Beaverstock et al.
patent: 5585734 (1996-12-01), Meuris et al.
patent: 5661696 (1997-08-01), Kimball et al.
patent: 5715181 (1998-02-01), Horst
patent: 5991703 (1999-11-01), Kase
patent: 6013533 (2000-01-01), Sugasawara et al.

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