Method for purifying trichlorosilane

Details Method for purifying trichlorosilane Method for purifying trichlorosilane

2005-01-18

2005-01-18

Bos, Steven (Department: 1754)

Chemistry of inorganic compounds

Modifying or removing component of normally gaseous mixture

Halogenous component

Reexamination Certificate

active

06843972

ABSTRACT:
The invention relates to a method for removing anhydrous acids and hydrohalogens from trichlorosilane by contacting the trichlorosilane with solid bases. The invention further relates to the use of the trichlorosilane so purified in the production of silane and/or super-pure silicon.

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K. Y. Li and C. D. Huang, 1988, no month, Redistribution Reaction of Trichlorosilane in a Fixed-Bed Reactor, Ind. Eng. Chem. Res., 27, 1600-1606.

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